Effects of ioninduced electron emission on magnetron plasma instabilities
نویسندگان
چکیده
Related Articles The Si3N4/TiN Interface: 4. Si3N4/TiN(001) Grown with a −250 V Substrate Bias and Analyzed In situ using Angle-resolved X-ray Photoelectron Spectroscopy Surf. Sci. Spectra 19, 62 (2012) The Si3N4/TiN Interface: 1. TiN(001) Grown and Analyzed In situ using Angle-resolved X-ray Photoelectron Spectroscopy Surf. Sci. Spectra 19, 33 (2012) The Si3N4/TiN Interface: 5. TiN/Si3N4 Grown and Analyzed In situ using Angle-resolved X-ray Photoelectron Spectroscopy Surf. Sci. Spectra 19, 72 (2012) The Si3N4/TiN Interface: 6. Si/TiN(001) Grown and Analyzed In situ using Angle-resolved X-ray Photoelectron Spectroscopy Surf. Sci. Spectra 19, 82 (2012) The Si3N4/TiN Interface: 2. Si3N4/TiN(001) Grown with a −7 V Substrate Bias and Analyzed In situ using Angleresolved X-ray Photoelectron Spectroscopy Surf. Sci. Spectra 19, 42 (2012)
منابع مشابه
Influence of O2 and N2 Concentrations on the Characteristics of Plasma in DC Cylindrical Magnetron Discharge by Langmuir Probe
Using the Langmuir probe method, the reactive plasma parameters were studied in different ratios of oxygen and nitrogen concentrations in a DC cylindrical discharge device.The plasma parameters such as plasma potential, electron density and electron temperature wereextracted from the current-voltage characteristic’s curve of Langmuir probe to find the optimum conditions for deposit the oxy...
متن کاملDeposition of Al/Cu Multilayer By Double Targets Cylindrical DC Magnetron Sputtering System
A cylindrical direct current magnetron sputtering coater with two targets for deposition of multilayer thin films and cermet solar selective surfaces has been constructed. The substrate holder was able to rotate around the target for obtaining the uniform layer and separated multilayer phases. The Al/ Cu multilayer film was deposited on the glass substrate at the following conditions: Working g...
متن کاملThe role of Ohmic heating in dc magnetron sputtering
Sustaining a plasma in a magnetron discharge requires energization of the plasma electrons. In this work, Ohmic heating of electrons outside the cathode sheath is demonstrated to be typically of the same order as sheath energization, and a simple physical explanation is given. We propose a generalized Thornton equation that includes both sheath energization and Ohmic heating of electrons. The s...
متن کاملEffects of the energetic-ion-driven instabilities on plasma heating, transport, and rotation in toroidal systems
A theory is developed from which it follows that energetic-ion-driven instabilities can, first, channel the energy of the energetic ions outside the region where these ions are located and, second, considerably affect the electron heat flux across the magnetic field. A new mechanism of the frequency chirping is revealed. Namely, it is shown that instabilities caused by the energetic ions can in...
متن کاملStudy of Plasma System by OES (Optical Emission Spectroscopy)
Low-temperature and low-pressure plasma was investigated by OES (optical emission spectroscopy) in the range 200–1100 nm. For displaying measured emission spectra and identification of spectrum lines the software Spectrum Analyzer was used. Two modes of glow discharge present in the DC cylindrical magnetron apparatus which were previously researched by a mass spectrometer were studied by OES. T...
متن کامل